Why can’t transmissive optics be used with EUV radiation?

EUV photons have an energy of around 90eV; the typical ionization energies of organic materials and metals are 7-9eV and 4-5eV respectively. Consequently, EUV photons are easily absorbed, generating photoelectrons and secondary electrons which prevents EUV radiation from transmitting through virtually all materials.

このコンテンツはお役に立ちましたか?
 
販売や技術サポート
 
もしくは 現地オフィス一覧をご覧ください
簡単便利な
クイック見積りツール
商品コードを入力して開始しましょう